Описание: Single particle ICP-MS (spICP-MS) sizes and counts particles as small as sub-10 nm at ultra-trace levels. It has been widely accepted as a powerful tool in many fields of study, for example single cell analysis by mass cytometry or CyTOF, environmental and industrial nanotoxicology. Its superb sensitivity and selectivity often distinguish it from other particle analysis techniques for many applications. This presentation will cover two recently developed applications in two critical semiconductor processes, ultrafiltration and chemical mechanical planarization (CMP). spICP-MS demonstrated its ability to advance the metrology to measure, for the first time, some important attributes of these processes. For example, spICP-MS successfully measured size-exclusion retention of nanoparticles by ultrafiltration membranes , and it also quantified the size changes of ceria nanoparticles before and after CMP processes . The fundamentals and applications will be discussed in more detail in the presentation.
Лектори:
Charlie (Qilin) Chan, Advanced Research Specialist, PhD, PMP, 3M Corporate Research Analytical Laboratory
Jenny Nelson, Application Scientist, Agilent Technologies
Продължителност: 1 час
Дата: 21 септември 2021, 22:30 ч. българско време
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