Описание: Automatic determination of ionic and nanoparticle contamination in semiconductor process chemicals and on silicon production wafers has become increasingly important. Elemental Scientific offers a wide range of products to monitor contamination in semiconductor materials. ScoutDX enables online, automated determination of single digit and sub-ppt ionic contamination in a wide range of process chemicals at greater than 300m distances. ScoutNANO adds the capability to perform automated nanoparticle determination, reference material calibration, and hardware for long-term nanoparticle solution stability. RadianVPD is a high speed VPD system for determining on-wafer contamination, offering the highest throughput VPD system available with a wide range of options for both production and R&D environments.
Лектори: Bert Woods, Application Scientist, Agilent Technologies, Inc.
Kyle Uhlmeyer, RadianVPD Applications Manager, Elemental Scientific
Austin Schultz, Project Engineer, Elemental Scientific
Продължителност: 1 час
Дата: 14 септември 2021, 22:30 ч. българско време
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